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一个基于离散时间高顺序双循环框架的零件激活纳米定位系统的高带宽控制
Longhuan Yu1, Xianmin Zhang1, Sergej Fatikow2
1Guangdong Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510000, China.
Sensors (Basel, Switzerland)
|September 27, 2025
概括
一个新的离散时间高顺序双循环控制框架显著提高了压力驱动纳米定位系统的带宽. 这种先进的控制策略提高了精度,克服了传统连续时间模型的局限性.
科学领域:
- 控制系统工程 控制系统工程
- 纳米技术 纳米技术
- 机械电子学是什么意思 机械电子学
背景情况:
- 由于共振和hysteresis,Piezo-actuated纳米定位系统面临带宽限制.
- 使用连续时间低阶模型的传统控制方法显示性能下降.
研究的目的:
- 提出一个新的双循环控制框架,用于压力驱动的纳米定位系统.
- 通过使用离散时间高阶模型来增强系统带宽和控制精度.
主要方法:
- 开发了一个基于离散时间高阶模型的双循环控制框架.
- 实现了离散时间线性二次调节器,用于参数优化.
- 利用了高阶状态反的直接离散实现和一个集成器.
主要成果:
- 实现了 8248 Hz 的实验带宽,超过了连续时间高阶 (3920 Hz) 和离散时间低阶 (6610 Hz) 模型.
- 实验频率响应与理论预测非常相匹配.
- 超过了6352赫兹的开环共振频率.
结论:
- 拟议的离散时间高阶双循环控制框架有效地提高了压力触动纳米定位的带宽和精度.
- 这种方法减轻了模型不匹配和离谱化错误,优于现有方法.
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