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Updated: Jan 16, 2026

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封装的微观结构的拓测量通过积极波浪-补偿连贯扫描干扰测量

Zhiyi Xu, Zhishan Gao, Jiale Zhang

|October 1, 2025

概括

我们开发了主动波面补偿连贯扫描干扰仪 (AWC-CSI),用于精确测量埋藏的微观结构. 这种新的技术通过封装层实现高分辨率成像,帮助先进的包装过程优化.

科学领域:

光学计量学在光学计量学
微结构分析微结构分析
半导体包装半导体包装

背景情况:

准确测量埋藏的微结构对于先进的半导体包装至关重要.
现有的技术面临的挑战是,通过封装层来降低信号退化.

研究的目的:

为埋藏的微观结构引入一种新,强大,高精度的测量技术.
在封装层下增强信号保真度和信号噪声比.

主要方法:

积极波线补偿连贯扫描干扰仪 (AWC-CSI) 的开发.
集成高数值光圈 (NA) 光学和可变形镜来纠正偏差.
在参考手臂中使用分散匹配的补偿板.

主要成果:

在100-300μm封装下,经证明的平均地形侧面分辨率约为0.95μm.
实现了0.89微米的系统光学分辨率.
显著提高了信号保真度和信号噪声比.

结论:

AWC-CSI提供有效的高精度检查埋藏的微观结构.
该技术显示了高级包装过程优化的潜力.
在包装微电子机械系统 (MEMS) 设备上验证的性能.

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相关概念视频

Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...