,

Seungpyo Kang1,2, JunHo Song1,2, Jinyoung Jeong2

  • 1School of Mechanical Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea.

概括

机器学习的原子间潜力 (MLIP) 准确地模拟了原子层沉积 (ALD) 的有机金属前体. 七网MLIP显示高精度和效率,使薄膜制造可靠的模拟.