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使用EELS和EDX进行多式电子断层扫描的工作流程,并将其应用于旋极分解的CuNiFe合金

Tatiana Kormilina¹, Georg Haberfehlner², Thomas Mairhofer Radlinger²

¹Institute of Electron Microscopy and Nanoanalysis (FELMI), Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; Graz Centre for Electron Microscopy (ZFE), Steyrergasse 17, 8010 Graz, Austria.

Ultramicroscopy

|October 7, 2025

概括

本研究介绍了电子断层扫描的自动化工作流程,通过使用EDX和EELS信号的组合来提高3D重建质量. 这些方法增强了纳米级沉分析,即使是低对比度样本.

科学领域:

材料科学材料科学材料科学
电子显微镜电子显微镜
频谱学是一种光谱学.

背景情况:

使用能量分散式X射线光谱 (EDX) 和电子能量损失光谱 (EELS) 的光谱电子断层扫描 (SET) 在获取和处理高保真3D重建数据方面面临挑战.
从具有较低对比度的材料,如螺旋合金中获得准确的3D结构信息仍然很困难.

研究的目的:

开发和介绍EDX和EELS倾斜系列的自动并行采集的全面工作流程.
建立后处理方法,以便在不同的仪器上获取的数据集相互关联.
展示多式联动关节重建的好处,以提高3D重建质量,并实现低剂量策略.

主要方法:

基于脚本的解决方案,用于在单个显微镜上自动并行获取EDX和EELS倾斜系列.
来自不同仪器的光谱数据集的相关联后处理技术.
结合EDX和EELS信号的多模式关节重建算法.

主要成果:

成功实施EDX和EELS光谱电子断层扫描的完整工作流程.
通过多式联接重建来证明改进的重建质量和较低剂量获取能力,特别是对于低样本或噪音数据.
应用于一个旋转CuNiFe合金,解决纳米级沉物结构的模糊性,这是由于固有的低HAADF对比度.

结论:

开发的工作流程有效地解决了光谱电子断层扫描数据采集和处理方面的挑战.
多模式关节重建显著提高了3D重建的准确性,特别是对于具有挑战性的样本和数据集.
这种方法使得像螺旋合金这样的材料的纳米级结构分析更强大.

关键词:

自动化自动化自动化压缩感应感应压缩感应在EDX中,EDX是EDX.鱼鱼鱼鱼鱼这是一个声音.断层扫描 (Tomography) 是一个专业的技术.

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