在芯片上使用大量声波进行粒子悬浮和微操作
Emilie Vuille-Dit-Bille1,2, Marc-Alexandre Dubois1, Junsun Hwang2
1CSEM SA, Neuchâtel, Switzerland. thomas.overstolz@csem.ch.
Lab on a chip
|October 10, 2025
概括
这项研究介绍了一种新的3D声流体平台,使用压电微机超声传感器 (PMUT) 来精确操纵流体中的微粒. 该系统实现了稳定的3D悬浮和粒子运输,推进了芯片实验室技术.
科学领域:
- 声学流体学 声学流体学
- 生物医学工程 生物医学工程
- 微流体学 微流体学
背景情况:
- 声流体学 (Acoustofluidics) 使用声波来进行微观的流体操纵.
- 表面声波设备在工作空间上有局限性.
- 现有的平面传感器配置限制了微通道表面附近的操作.
研究的目的:
- 介绍一个新的3D声流体平台,使用可数字地址的压电微机超声传感器 (PMUT) 阵列.
- 在3D流体腔室内生成和描述大量声波和声陷.
- 为了证明微粒的决定性3D悬浮和运输.
主要方法:
- 利用有限元建模和实验测量来量化声场分布.
- 研究了声音陷形成的动态.
- 采用声场的时空调制用于粒子操纵.
主要成果:
- 证明了30微米聚乙烯颗粒的确定性3D悬浮,在表面上方高达640微米,位置误差<6%.
- 使用高达90 pN的声辐射力,在连续流下 (高达40 μL min-1) 实现了稳定的颗粒捕获.
- 通过声场调制展示了微粒子聚合物的连续平面运输.
结论:
- 开发的基于PMUT的声流体平台可以在流体室中进行精确的3D微操作.
- 该系统具有可扩展性,并可轻松与使用标准微型制造技术的紧流体系统集成.
- 这项工作为用于实验室芯片应用的可重新配置和先进的声流体微操作系统提供了基础.
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