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在CVD培养的钻石涂层器上的窄带深紫外线传感器

Manish Singh Rautela¹, Taslim Khan¹, Santanu Kandar¹

¹Department of Physics, Indian Institute of Technology Delhi, New Delhi 110016, India.

ACS applied materials & interfaces

|October 13, 2025

概括

这项研究介绍了钻石上的新型深紫外线光探测器 (DUV PD),在没有过器的情况下提供窄带检测. 它在高温下保持性能,非常适合安全的通信和监控.

科学领域:

光电学是指光电子产品.
材料科学材料科学材料科学
固态物理固态物理

背景情况:

技术应用,如加密通信和环境监测,需要精确的波长检测.
传统的宽带光电探测器 (PD) 通常需要外部波长过器,增加复杂性和成本.
探测特定波长的进步提高了系统的安全性,效率和准确性.

研究的目的:

在化学蒸汽沉积 (CVD) 培养的钻石上制造的耐热金属半导体金属深紫外光探测器 (MSM DUV PD).
为了证明该设备在深紫外线 (DUV) 范围内作为窄带PD的能力.
调查负责窄带检测的潜在机制,并评估在高温下性能.

主要方法:

在CVD培养的钻石上制造MSM DUV PD.
描述光谱响应,响应度和半最大时全宽度 (FWHM).
评估设备性能,包括暗电流,检测能力,噪声等效功率和响应时间,在高达423K的温度下.
分析钻石的阴极发光和光发光特性,以了解检测机制.

主要成果:

制造的MSM DUV PD在DUV区域表现出窄带检测,FWHM为14.4nm,在5V偏差下,峰值响应在210nm.
窄带检测功能在高温下维持在高达423K的温度下.
通过钻石带隙中的陷能量状态的辐射和非辐射重组被确定为窄带检测的原因.
该设备显示了低暗电流 (10−14 A),高检测能力 (2.64 × 1011 Jones),低噪声等效功率 (1.4 × 10−13 W/Hz1/2) 和0.8秒的响应时间.
观察到自偏操作模式.

结论:

通过CVD培养的钻石是制造热弹性,窄带DUV光探测器的有希望的材料.
开发的MSM DUV PD通过消除对外部过器的需求,为传统宽带PD提供了优势.
该设备的性能特点,包括高检测能力和低暗电流,使其适合在杂环境中检测弱信号.
了解陷状态在重组中的作用对于优化未来的DUV光探测器设计至关重要.

关键词:

在CVD培养的钻石中.深紫外光电探测器深紫外光电探测器窄带光电探测器的使用.自我偏见是一种自我偏见.单晶钻石是一个单晶钻石.

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