通过面具级别的热力和机械控制,在石版画中有效的场内覆盖补偿
Dinghai Rui1,2,3, Libin Zhang1,2,3, Yayi Wei1,2,3
1EDA Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, People's Republic of China.
Nanotechnology
|October 13, 2025
概括
这项研究引入了一种使用面罩热力学效应来提高光刻精度的新场内叠加控制方法. 这种新的方法显著减少了重叠错误,满足了集成电路的先进节点要求.
科学领域:
- 半导体制造业 半导体制造业
- 石版技术 石版技术 石版技术
- 材料科学 材料科学 材料科学
背景情况:
- 覆盖是影响先进的集成电路 (IC) 制造中的光刻精度的关键因素.
- 传统的覆盖校正方法面临着缩小过程节点的局限性.
研究的目的:
- 提出和验证一种新的领域内重叠控制方法.
- 为了解决在先进的IC节点中因叠加而导致的光刻精度下降.
- 为了利用面具的热力学效应来进行精确的覆盖校正.
主要方法:
- 利用了143个像素级热调节方案和16个应力应用策略.
- 采用第三阶层叠加分解与物理,数学和统计建模.
- 使用多个数据集验证了方法,并确定了关键限制参数 (K15,K19,K20).
主要成果:
- 实现了高补偿效应:98.28% (X方向) 和99% (Y方向) 在模拟中.
- 通过验证证明了97.99% (X) 和98.08% (Y) 的平均补偿效应.
- 对于高级节点 (14 nm及以上),其余重叠错误始终为<1 nm.
结论:
- 拟议的场内覆盖控制方法有效地减轻了石版精度问题.
- 基于热力学面具的方法满足了下一代IC严格的重叠要求.
- 未来的工作包括优化与真实的刻版数据和探索更高层次的校正.
更多相关视频
09:45Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
Published on: June 12, 2018
10.0K
06:21Design and Development of a Three-Dimensionally Printed Microscope Mask Alignment Adapter for the Fabrication of Multilayer Microfluidic Devices
Published on: January 25, 2021
3.3K
相关概念视频
Bricks
Bricks, a fundamental building material, are crafted from fired clay and exhibit a range of shapes, sizes, and colors. The production process starts with extracting local clay or shale, which is then crushed, ground, and screened for a fine texture. The refined material is blended with water, creating a pliable mixture that can be formed into bricks using one of three processes: soft mud, dry press, or stiff mud methods.
Soft mud bricks are shaped in molds with high moisture content and can be...
Soft mud bricks are shaped in molds with high moisture content and can be...
Composite Masonry Walls
Composite masonry walls combine multiple wythes of the same or different masonry materials to create a unified structure. These walls feature wythes that are bonded together either through mortar-filled collar joints, grouted spaces, or more commonly, with rigid metal ties and reinforcements, with the use of masonry header units being rare. Metal ties are preferred because they effectively minimize water penetration, as these walls primarily absorb moisture and then release it into the...
Thermal Insulation in Masonry Walls
In hot, dry climates, the thermal mass of masonry walls can be beneficial, absorbing heat during the day and releasing it at night, thereby stabilizing indoor temperatures. However, in most other climates, additional insulation is necessary to enhance thermal resistance.
External insulation can be applied using an Exterior Insulation and Finish System (EIFS), which involves affixing panels of plastic foam to the wall and covering them with a polymeric stucco reinforced with glass fiber mesh.
External insulation can be applied using an Exterior Insulation and Finish System (EIFS), which involves affixing panels of plastic foam to the wall and covering them with a polymeric stucco reinforced with glass fiber mesh.
Masonry in Cold and Hot Weather Conditions
In cold weather, masonry construction requires specific precautions to ensure mortar does not freeze before curing, as this can significantly weaken its strength and watertightness. Mortar temperature should be maintained between 60°F and 80°F to support proper hydration and curing. Below 40°F, mortar water must be heated, but should not exceed 120°F as high temperatures can reduce mortar's compressive and bond strength.
Other key practices include keeping masonry units and sand dry and...
Other key practices include keeping masonry units and sand dry and...
Surface Integrals
A curved roof has a surface area that is generally larger than its flat projection. To estimate the cost of painting it, the curved surface area must first be calculated. If the roof is represented parametrically by a vector-valued function r(u,v), then each point in a parameter domain D corresponds to a point on the surface S. This connection allows the curved surface to be studied through a two-dimensional parameter region.The parameter domain D is divided into many small rectangles. A...
