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Updated: Jan 15, 2026

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在混合-化--酸平台上的高带宽电光调制器

Yun Wang, Yuqi Chen, Wenfeng Zhou

|October 15, 2025

概括

这项研究引入了一种新的集成电光调制器,使用薄膜坦酸和化. 该设备实现了改进的调制效率和创纪录的67GHz电光带宽.

科学领域:

光子学是一个光子学.
材料科学材料科学材料科学
电气工程电气工程

背景情况:

集成电光调制器对于通信网络至关重要.
薄膜坦酸盐 (TFLT) 是一个有前途的材料,但垂直蚀刻具有挑战性.
化 (SiN) 蚀刻提供了精确的垂直控制.

研究的目的:

在TFLT和SiN异质平台上提出和演示一个集成的电光调制器.
通过利用SiN蚀刻技术来克服TFLT的蚀刻挑战.
为了提高调制效率并实现高电光带宽.

主要方法:

使用TFLT和SiN异质平台制造一个马赫-泽恩德调制器.
优化光场结构和电极设计.
调制效率和电光带宽的表征.

主要成果:

实现了2.75V·cm的半波电压长度乘积,表明调制效率有所提高.
成功测量了67GHz的电光带宽,这对于这些设备来说是一个重大进步.
证明了用于集成光子学的异质TFLT和SiN平台的可行性.

结论:

拟议的异质TFLT和SiN平台使高性能集成电光调制器成为可能.
优化的设备设计显著提高调制效率和带宽.
这项工作为下一代光通信和信号处理铺平了道路.

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