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基于二维音声晶体的高灵敏度加速传感的理论和分析

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    IEEE transactions on ultrasonics, ferroelectrics, and frequency control
    |October 21, 2025
    PubMed
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    这项研究引入了一种使用二维声波晶体 (PnCs) 和超声波的新型加速传感器. 音声晶体传感器实现了高灵敏度,为微电子机械系统 (MEMS) 传感器提供了一个有前途的新方向.

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