SEM.

Hyunwoong Bae1, Jaeseok Byun2, Yongwoo Lee3

  • 1Interdisciplinary Program in Artificial Intelligence, Seoul National University, Gwanak-ro, South Seoul 08826, Korea.

概括

我们开发了Relaxed Noise2Noise with Input dropout (ReNIn) 用于扫描电子显微镜 (SEM) 消除噪声. ReNIn为晶圆缺陷检查提供了高效的培训和改进的泛化.