Mohammadreza Fasihanifard1, Muthukumaran Packirisamy2

  • 1Optical-Bio Microsystems Laboratory, Department of Mechanical, Industrial and Aerospace Engineering, Concordia University, Montreal, QC, Canada.

PubMed
概括

静电驱动器中的角形指纹设计显著提高了光子设备的力和行程范围. 这种优化对于需要紧,高性能执行器的先进光学微系统至关重要.