在使用双模式操作方法的微分MEMS共振加速度计中抑制温度漂移和消除测量死区
Bingchen Zhu1,2,3, Zheng Wang3, Liangbo Ma4
1The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, China.
Microsystems & nanoengineering
|October 28, 2025
概括
对于微分MEMS共振加速度计 (DMRA) 的新型差分模式测量和控制系统 (DMCS) 将共振器运行在不同的模式中,显著降低温度漂移和噪声. 这项创新提高了加速度计的稳定性和准确性,用于精确的加速度测量.
科学领域:
- 微电子机械系统 (MEMS) 技术
- 惯性传感器是一种惯性传感器.
- 对振动进行分析.
背景情况:
- 传统的微分MEMS共振加速仪 (DMRA) 由于合的振动模式,可能会受到干扰和测量死亡区域的影响.
- 温度波动可以诱导常态效应,降低加速度计的准确性.
- 环境噪音也会影响MEMS加速度计的长期稳定性和精度.
研究的目的:
- 为DMRA提出和验证一种新的差分模式测量和控制系统 (DMCS).
- 在不同的振动模式 (R1M1和R2M2) 中运行差异共振器,以防止频率交叉和相互干扰.
- 增强DMRA的结构对称性和温度一致性,抑制常态效应并提高整体性能.
主要方法:
- 在第一顺序模式 (R1M1) 中运行第一个共振器,并在第二顺序模式 (R2M2) 中运行第二个共振器.
- 实施差异温度补偿算法以减轻热漂移.
- 使用差分测量方法来消除常态环境噪声.
主要成果:
- 在温度补偿 (-20°C至80°C) 后,等效加速漂移从300毫克以上减少到1.19毫克.
- 最小艾伦差异从约1.5μg@0.85s提高到0.23μg@7.15s,表明长期稳定性得到改善.
- 达到220 ng/√Hz @(0.2-0.8 Hz) 的噪声水平,测量范围为±5g.
结论:
- 拟议的DMCS有效地通过结构对称性和独特的共振器模式来抑制温度诱导的常态效应.
- 不同测量策略显著改善了长期稳定性,并减少了环境噪声干扰.
- 这种先进的DMRA系统在高精度加速传感应用中表现出卓越的性能.
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