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使用基于GaN/Si SAW共振器的SiGe HBT振荡器的热气流传感器

Wenpu Cui¹, Jie Cui¹, Wenchao Zhang¹

¹School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.

|October 29, 2025

概括

这项研究引入了一种使用表面声波 (SAW) 温度传感器和高频振荡器的新型热气流传感系统. 集成系统实现了准确的非接触式流量测量,具有出色的动态响应和可重复性.

科学领域:

材料科学材料科学材料科学
电气工程电气工程
传感器技术传感器技术

背景情况:

精确的气体流量测量在各种工业应用中至关重要.
现有的流量传感器通常在准确性,响应时间或寿命方面面临限制.
微型化和传感元件的集成是现代传感器开发的关键趋势.

研究的目的:

开发和展示一个小型化的,集成的热气流传感系统.
使用表面声波 (SAW) 温度传感器来精确监测流系统内的温度.
为了实现高性能,非接触式气体流量测量.

主要方法:

制造一个单端口化对 (GaN/Si) SAW振荡器.
使用-异极连接双极晶体管 (SiGe HBT) 构建一个对温度敏感的高频振荡器.
实现双振荡配置和模块化集成,用于系统级流量测量.

主要成果:

SAW 装置显示频率温度系数 (TCF) 为 -28.29 ppm/K,具有高线性 (0.998).
振荡器在1.91 GHz运行,具有良好的相位噪声特性.
该系统展示了精确测量每分钟0-50标准立方厘米 (sccm) 流量,响应时间<1秒,误差<0.9%,可使用分流技术扩展到更高的范围.

结论:

开发的热气流传感系统提供了高稳定性,长寿命和出色的性能.
无接触操作和模块化设计确保了气体流量测量的广泛应用前景.
整合SAW振荡器和SiGe HBT振荡器为先进的流量传感提供了一个强大的平台.

关键词:

在 GaN GaN 中.看到的就是看到的.如果Ge HBT HBT 气体流传感器是气体流传感器.热热的热量是可以实现的.

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