微光电机械发电合式加速计的热敏度
Evgenii Barbin1,2, Ivan Kulinich1, Tamara Nesterenko1,3
1Research Institute of Microelectronic Systems, The Tomsk State University of Control Systems and Radioelectronics, 634050 Tomsk, Russia.
Sensors (Basel, Switzerland)
|October 29, 2025
概括
本研究分析了微光电机械 (MOEM) 加速度计的热灵敏度. 光学元件对温度变化比机械元件更敏感,这会影响设备的准确性.
科学领域:
- 光电机械系统 光电机械系统
- 在 MEMS 技术方面,MEMS 技术
- 传感器物理学的物理
背景情况:
- 微光电机械 (MOEM) 加速度计利用光学原理进行传感.
- 热敏度是影响MOEM设备性能和准确性的关键因素.
- 了解热效应对于设计可靠的在各种温度下运行的加速度计至关重要.
研究的目的:
- 为了研究MOEM加速度计中机械和光学传输系数的热灵敏度.
- 分析光学和机械元件对热敏度的贡献.
- 为了评估温度对加速度计的影响,使用定向合器和共振器传感器.
主要方法:
- 对光学薄膜的折射率依赖温度的实验测量.
- 对材料特性和内部应力产生热效应的分析.
- 计算光学和机械传输系数的热灵敏度.
主要成果:
- 光学薄膜的折射率随着温度的增加 (SiN的0.12642 ppm/°C).
- 光学传输系数的灵敏度为580 ppm/°C (定向合器) 和0.33 °C-1 (共振器).
- 机械传动系数的灵敏度为120 ppm/°C.
结论:
- 光学元件对MOEM加速度计的整体热误差作出了重大贡献.
- 热光学效应是一个主要因素,特别是在基于共振器的传感器中.
- 恒温控制对于这些加速度计的准确运行至关重要,特别是基于共振器的设计.
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