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Updated: Jan 12, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

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新型低压MEMS共振器具有高f×Q产品灵感来自钟盘

T Zhu, E Lefeuvre, A Bosseboeuf

    IEEE transactions on ultrasonics, ferroelectrics, and frequency control
    |November 3, 2025
    PubMed
    概括

    研究人员使用"钟盘"设计开发了新的在绝缘体 (SOI) 微电子机械共振器. 这些共振器实现了高质量因素,并显示了先进的传感和计时应用的前景.

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