单立体集成的三轴高性能高g加速度计用于高冲击振动信号测量
Mingzhi Yu1,2,3, Xiaoyu Wu4, Libo Zhao5,6,7,8
1State Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.
Microsystems & nanoengineering
|November 4, 2025
概括
这项研究引入了一种新的三轴高g加速度计设计,可以实现用于冲击振动分析的纯轴变形. 这一创新简化了用于武器系统的高性能加速度计的设计.
科学领域:
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
- 传感器技术 传感器技术
背景情况:
- 高g加速度计对于先进武器系统中冲击振动分析至关重要.
- 在压电阻束中实现纯轴变形是具有挑战性的,并使加速度计设计复杂化.
- 现有的方法需要复杂的计算和特定的结构来近似纯轴变形.
研究的目的:
- 介绍一款创新的三轴高g压电阻加速度计设计.
- 为了使压电阻束的位置独立的纯轴变形.
- 简化加速度计的设计,用于测量高达20万g的极端加速度.
主要方法:
- 开发了一种三轴加速度计设计,具有同步变形机制.
- 该机制取消横向变形组件,确保纯轴变形.
- 利用实验验证来评估性能特征.
主要成果:
- 实现了压电阻束的位置独立的纯轴变形.
- 证明了测量能力,用于加速高达20万g的加速.
- 实验结果显示了超高的自然频率 (>1.5 MHz) 和高灵敏度 (>1.15μV/g).
结论:
- 这种新的设计消除了高g加速度计的复杂设计程序.
- 同步变形机制确保了整个测量范围的纯轴变形.
- 这种方法为设计高性能压电阻加速计提供了一种方便的方法.
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