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使用选择性激光蚀刻,具有亚微米特征的玻璃表面结构.

Axel Günther1,2,3, Xiaowei Wang4, Wolfgang Kowalsky5,6

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概括

选择性激光蚀刻 (SLE) 在玻璃中为光学创建微观结构. 优化的SLE参数实现了光学表面质量,使可见光微光学制造无需额外的步骤.

关键词:
集成光学 集成光学光学波导是一种光学波导.有选择性的激光蚀刻.

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科学领域:

  • 材料科学 材料科学 材料科学
  • 光学和光子学 在光学和光子学.
  • 微型制造业的微型制造

背景情况:

  • 选择性激光蚀刻 (SLE) 是在玻璃中制造微流体和微机械结构的关键技术.
  • 目前,SLE的应用主要在微流体和微机械领域,在光学生产领域的探索有限.
  • 通过SLE直接实现光学质量的表面是具有挑战性的,因为表面粗度的限制.

研究的目的:

  • 研究选择性激光蚀刻 (SLE) 参数的优化,用于在玻璃中生产光学质量的表面.
  • 确定使用SLE用于直接制造光学元件和集成光学结构的可行性.
  • 为了达到适合可见波长应用的表面粗度,不需要后处理.

主要方法:

  • SLE参数的系统变化,包括阶段速度,激光功率,偏振和重复率.
  • 表面粗度的表征,使用形计或原子力显微镜.
  • 使用SLE和氧化物 (KOH) 蚀刻,在化中制造微结构.

主要成果:

  • 通过优化SLE参数,通过优化SLE参数,获得了大约30nm的表面粗度.
  • 这种表面粗度足以制造可见波长范围的光学元件和集成光学结构.
  • 成功地制造出具有小于1μm的特征大小的独立微结构.

结论:

  • 选择性激光蚀刻 (SLE) 可以优化,以在玻璃中产生光学质量的表面,从而消除了对额外抛光步骤的需求.
  • 优化的SLE工艺可以直接制造可见光应用的微光元件和集成光学结构.
  • 这一进步有助于在化中生产精确的微观结构,例如光学格子.