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Updated: Jun 30, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators

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Published on: July 2, 2012

适用于长波红外频率的紧型-微振解器

Hamza Dely, Victor Turpaud, Annabelle Bricout

|November 11, 2025

概括

采用 - 波导的紧型微复原器可以实现长波红外应用的高质量因素. 这些设备在光学过和子生成方面表现有前途.

科学领域:

光子学和光学工程的工程.
材料科学材料科学材料科学
红外技术红外技术

背景情况:

微振解器对于集成光子电路至关重要.
长波红外 (LWIR) 应用需要专门的光学组件.
- (SiGe) 为红外应用提供可调节的光学特性.

研究的目的:

为长波红外 (LWIR) 频谱制造和表征紧型微振荡器.
为了研究 - 等级波导在微共振器设计中的性能.
评估这些微振荡器在先进光子应用中的潜力.

主要方法:

使用 - 等级波导制造100微米半径的微复原器.
在LWIR波长 (7.5微米和8微米) 的微振器的光学特征.
测量内在质量因素和灭绝率的测量.

主要成果:

获得的内在质量因子超过7.5μm时的4×104和8μm时的2×104.
证明了具有0dB灭绝比率的共振.
成功制造了紧型LWIR微回振器.

结论:

开发的SiGe微振器在LWIR运行方面表现出高性能.
这些微复原器适合集成到芯片上的光学系统中.
潜在的应用包括Kerr-comb生成,光学过和LWIR范围内的复杂化.

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