概括
这项研究介绍了一种高效的薄膜尼酸移动波调节器. 它实现了低半波电压长度产品,实现更快的数字通信和模拟链接.
科学领域:
- 光子学 是一个光子学.
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
背景情况:
- 薄膜酸 (TFLN) 电光调制器对于先进的通信系统至关重要.
- 传统的TFLN调制器由于光学和射频 (RF) 场的重叠差,因此遭受高半波电压长度产品 (Vπ·L) 的损害.
- 这限制了它们在高 baud率数字和高载波频率模拟应用中的效率和速度.
研究的目的:
- 开发一个高效率的TFLN旅行波 (TW) 马赫-泽恩德调制器 (MZM).
- 改进TFLN调制器的电压长度产物和运行带宽.
- 为TFLN TW-MZM提出一个高频模型,采用透明电极.
主要方法:
- 一个TFLN TW-MZM的制造,其中包含了顶透明电极.
- 调节器的电光 (EO) 性能的表征,包括Vπ·L和EO带宽.
- 考虑电极电阻和场重叠的高频模型的开发.
主要成果:
- 达到0.33V·cm的低Vπ·L,显著提高调制效率.
- 展示了一个300μm长的设备,EO响应在110GHz下滚动2.4dB,外推的3dBEO带宽为145GHz.
- 在芯片上插入损失测量为2.7dB.
- 根据电极电阻率确定了三个操作区域 (缓波,分散,高残留).
- 确定慢波区域所需的电阻<3 × 10−3 Ω·cm,对于高效率和速度至关重要.
结论:
- 拟议的具有透明电极的TFLN TW-MZM在调节器性能方面取得了显著的进步.
- 实现的低Vπ·L和高带宽对于下一代通信系统至关重要.
- 电极电阻控制对于优化调制器效率和速度至关重要,而慢波区域至关重要.
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