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Updated: Jan 11, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

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在参数调制下,在合的非线性MEMS共振器中进行可调节的能量传输,以提高传感器性能

Guijie Wang1, Shenglin Hou2, Najib Kacem3

  • 1School of Mathematics and Physics, Beijing Weak Magnetic Testing and Applied Engineering Technology Research Center, University of Science and Technology Beijing, Beijing, China.

Microsystems & nanoengineering
|November 11, 2025
PubMed
概括

这项研究证明了使用参数调制在合的微电子机械共振器中可调节的能量传输. 这种方法使传感器的灵敏度提高了两倍.

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