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综合AFM/SEM系统的综合分析用于现场纳米表征和多参数相对显微镜

Prabhu Prasad Swain¹, Marcos Penedo¹, Georg Ernest Fantner¹

¹Laboratory of Bio- and Nano- Instrumentation, Institute of Bioengineering, School of Engineering, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne 1015, Switzerland.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|November 12, 2025

概括

本综述详细介绍了扫描探针显微镜 (SPM) 和扫描电子显微镜 (SEM) 的集成,以进行增强的纳米分析. 混合系统提供相关的多参数数据,促进科学发现.

科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
分析化学分析化学

背景情况:

扫描探针显微镜 (SPM) 和扫描电子显微镜 (SEM) 对于纳米尺度的表征至关重要.
现场结合是常见的,但现场集成是一个越来越多的重点.
相关性,多参数和多维分析的需求越来越大.

研究的目的:

审查创建一个结合的SPM/SEM平台的技术进步.
突出纳米分析现场集成的好处.
展示跨科学学科的混合SPM/SEM系统的应用.

主要方法:

讨论混合系统的机械集成和读出电子.
探索成像模式和速度优化的进展.
专注于实现一个一致的SPM/SEM混合系统.

主要成果:

成功的集成使得同时或连续的数据采集成为可能.
相对成像提供更丰富,补充纳米信息.
混合系统促进多参数和多维样本分析.

结论:

集成的SPM/SEM系统比独立的技术具有显著的优势.
技术进步正在使强大的多功能混合平台成为可能.
这些综合方法对于解决化学物理和生物化学等领域的复杂挑战至关重要.

关键词:

原子力显微镜的原子力显微镜.相关显微镜的相关显微镜.多参数成像技术的使用.扫描电子显微镜扫描电子显微镜

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