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使用原子探头断层扫描评估兴奋剂的空间分布和局部原子环境的统计方法

Jhao-Rong Lin^1,2, Richard J H Morris¹, Jeroen E Scheerder¹

¹imec, Kapeldreef 75, Leuven B-3001, Belgium.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|November 12, 2025

概括

原子探头断层扫描揭示了纳米级在的多不均性. 这种方法将兴奋剂水平与矩阵组成变化相关联,为半导体生长过程提供了洞察力.

科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
半导体物理半导体物理

背景情况:

剂的空间不均性影响半导体性能.
了解纳米级的剂分布对于先进材料至关重要.

研究的目的:

开发一种方法来表征纳米级的剂不均质性和局部化学环境.
为了研究-化的基中剂的分布.

主要方法:

原子探头断层扫描用于原子尺度分析.
最近邻原子局部组成分析.
科尔摩戈罗夫-斯米尔诺夫或安德森-达林统计测试用于不均性评估.

主要成果:

证明了,和的不均分布.
建立了兴奋剂水平与周围矩阵组成变化之间的相关性.
提供了原子尺度的洞察力,对多邦体的结合和表轴生长.

结论:

开发的方法有效地描述了纳米级的多邦异质性.
补充剂的结合行为与德国的表生长有关.
提供了对半导体中 dopant 行为的新的实验理解.

关键词:

在现场使用兴奋剂.原子探头断层扫描 (tomography) 是一种原子探头.当地化学环境当地化学环境空间分布的空间分布

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