MEMS,

Longqi Ran1, Wensheng Zhao2, Ting Li1

  • 1School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

PubMed
概括

微杆和共振器的形状优化显著提高了MEMS共振加速仪的灵敏度. 这种方法达到480.2Hz/g的高灵敏度,提高了惯性传感应用的精度.