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相关实验视频

Updated: Jan 11, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Published on: November 30, 2012

使用可编程聚焦离子束雕塑的光学波导面部准备.

Connor D Wong, Henry C Frankis, Bhaveshkumar Kamaliya

|November 14, 2025

概括

聚焦离子束 (FIB) 雕塑提供了一种快速的30秒方法,用于在化波导上准备低损耗光学方面. 这种自动化技术可确保高光学质量,实现高效的光纤芯片和芯片芯片合.

科学领域:

光子学是指光子学的使用方法.
材料科学材料科学材料科学
纳米技术纳米技术

背景情况:

制造光子设备需要精确准备光学方面,以实现高效的光合.
低损耗合对于光子系统中的光纤芯片和芯片芯片集成至关重要.

研究的目的:

介绍和演示一种聚焦离子束 (FIB) 雕塑方法,用于制备高质量的光学方面.
在化波导上评估FIB制备的面板的效率和光学性能.

主要方法:

利用聚焦离子束 (FIB) 雕塑用于商业化波导上面部制备.
研究了FIB电流对面质量和合损失的影响.
演示了一个概念验证的自动化FIB过程,用于可扩展的面部准备.

主要成果:

在FIB雕塑中,每面在15 nA的30秒内完成了面部准备.
侧面显示低合损失,主要是由于模态不匹配,表明高光学质量.
较高的FIB电流导致波导面变形,并增加了合损失.
一个自动化过程在没有用户干预的情况下成功准备了22个方面.

结论:

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Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes

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Last Updated: Jan 11, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Published on: November 30, 2012

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

Published on: February 25, 2017

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes

Published on: January 19, 2020

FIB雕塑是一种有效和快速的技术,用于创建用于光子集成的低损耗光学方面.
演示的自动化过程是无物质的,并且可用于集成光子系统的可扩展.
FIB雕塑具有创造光学集成的对齐特征的潜力.