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在模拟的半导体化物环境下,不钢 bellows 的空气传播排放和腐蚀

Donghyeon Kim¹, Jongcheol Lee², Minjung Kim¹

¹Department of Environmental Health Sciences, Graduate School of Public Health, Seoul National University, 08826, Republic of Korea.

Journal of hazardous materials

|November 18, 2025

概括

不钢 bellows 在半导体系统中腐蚀,释放有害颗粒和金属. 与AISI 316Ti相比,合金926对化物腐蚀具有优越的抗性,减少了空气污染的风险.

科学领域:

材料科学材料科学材料科学
环境科学环境科学
化学工程是化学工程的重要组成部分.

背景情况:

半导体制造业使用了带有不钢 bellows 的-scrubber 系统.
这些 bellows 容易受到化物诱导的腐蚀,导致颗粒和金属释放.
这种腐蚀对职业健康和环境质量构成风险.

研究的目的:

在模拟的化物丰富条件下,评估AISI 316Ti和合金926的耐腐蚀性和排放特性.
为量化腐蚀导致的空气中的颗粒和金属排放.
为了评估合金中的表面退化和坑洞形成.

主要方法:

模拟AISI 316Ti和合金926的化物丰富暴露72小时.
使用扫描移动粒子测量仪和光学粒子测量仪进行粒子大小分布分析.
通过立体显微镜和SEM-EDS进行表面形态和坑洞深度分析.
使用ICP-MS进行空中金属量化和通过离子染色学确定化离子.

主要成果:

在AISI 316Ti中,峰值粒子直径为850nm,度为3.86 × 107颗/cm3.
合金926的峰值颗粒直径为950nm,其度为5.91 × 106颗粒/cm3.
来自316Ti的空气中的超过了职业限制,表明吸入危险.
316Ti的孔深为3-15微米,而926合金的孔深为0.5-3微米.

结论:

合金926比AISI 316Ti.Ti.对化物腐蚀的抵抗性明显更好.
这些发现支持选择耐腐蚀合金,以减轻半导体制造中的空气污染.
排放数据有助于用于职业暴露和环境影响评估的预测建模.

关键词:

空气中的排放量.腐蚀是一种腐蚀.化物环境化物环境重金属是一种重金属.不钢的气管有自己的风口.

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