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在微型LED维修应用中通过使用秒激光诱导分解光谱的深度分析进行接口识别

Woonkyeong Jung^1,2, Janghee Choi¹, Gookseon Jeon^1,3

¹Industrial Transformation Technology Department , Research Institute of Sustainable Development Technology Korea Institute of Industrial Technology , 89 Yangdaegiro-gil, Ipjang-myeon, Seobuk-gu, Chungcheongnam-do 31056, Cheonan-Si, Republic of Korea.

Scientific reports

|November 19, 2025

概括

五秒激光诱导分解光谱 (fs-LIBS) 为微型发光二极管 (micro-LED) 维修提供实时元素分析. 这种先进的技术精确地识别了层接口,减少了损坏,并提高了微型LED显示屏的维修准确性.

科学领域:

材料科学材料科学材料科学
光电学是指光电子产品.
频谱学是一种光谱学.

背景情况:

微型发光二极管 (micro-LED) 显示器的商业化需要高效,高精度的芯片传输.
4K/8K显示器中的高像素密度挑战了无缺陷的传输,需要有效的修复策略.
传统的激光修复缺乏实时监控,有可能损坏和不精确的切除深度控制.

研究的目的:

引入秒激光诱导分解光谱 (fs-LIBS) 作为微型LED维修的新工具.
在微型LED维修过程中评估fs-LIBS,同时进行实时元素分析和高空间分辨率.
为了证明fs-LIBS在多层微LED结构中识别关键接口的能力.

主要方法:

使用fs-LIBS分析了定制制的多层微LED,使用不同激光脉冲能量的fs-LIBS进行分析.
来自构成元素 (例如,Ga,Au) 的光谱辐射被检测和分析.
通过扫描电子显微镜与能量分散式X射线光谱学 (SEM-EDS) 进行深度分析和元素映射用于验证.

主要成果:

fs-LIBS成功检测到了关键微型LED元件的光谱辐射.
(Ga) 和黄金 (Au) 信号的变化准确地确定了p-pad/p-contact层接口.
深度分析通过监测正常化的Ga和Au信号强度证实了接口.
SEM-EDS元素测绘验证了fs-LIBS对废弃坑组成的发现.

结论:

fs-LIBS是一种有前途的技术,可以在微型LED维修过程中实时监控.
该方法通过最大限度地减少对邻近结构的意外损坏来提高维修精度.
fs-LIBS通过改进的缺陷修复,为微型LED显示器生产的可行性做出了贡献.

关键词:

深度分析 (depth profiling) 是一种深度分析方法.五秒激光激光的使用时间为5秒.接口识别接口识别激光诱导的分解光谱学微型LED维修维修

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