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Updated: Jun 17, 2026

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在干蚀尼奥酸盐与热化丝素面具的干蚀时提高选择性

Songyan Hou1, Chengyi Zhu1, Jiajun Zhang1

  • 1Guangzhou Institute of Technology, Xidian University, Guangzhou, People's Republic of China.

Nanotechnology
|November 19, 2025
PubMed
概括

丝酸 (HSQ) 面具的热化显著提高了薄膜酸 (TFLN) 干蚀刻的选择性. 这一进步提高了TFLN设备的制造,而不会影响光学性能.

关键词:
干蚀刻是干蚀刻的方法之一.尼酸是一种酸.选择性的选择性

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