白光色度干涉测量用于测量半导体结构上的厚度和地形
Jaeseung Im1, Heewoo Lee1, Kyeongjun Jang1
1Department of Physics, Incheon National University, Academi-ro 119, Incheon, 22012, Republic of Korea.
Scientific reports
|November 25, 2025
概括
这项研究引入了色度白光干扰计 (WLI) 用于精确的薄膜测量. 该方法准确地确定了地形和100nm以下薄膜的厚度,经过TEM和AFM的验证.
科学领域:
- 计量学 计量学 计量学
- 光学测量 测量 光学测量
- 薄膜分析 薄膜分析
背景情况:
- 反射计和白光干扰计 (WLI) 是用于厚度和地形测量的高分辨率技术.
- 精确地描述薄膜,特别是100nm以下的薄膜,仍然是计量学的挑战.
研究的目的:
- 展示一种色度测量WLI方法与反射计相结合,用于同时测量薄膜的地形和厚度.
- 为了实现光学显微镜侧面分辨率低于1μm的薄膜结构的计量成像.
主要方法:
- 使用彩色摄像头和多带宽波器进行色度WLI和反射计.
- 采用色度反射计来确定薄膜厚度,并在WLI装配过程中固定它以提取表面地形.
- 测量了二氧化 (SiO2) / (Si) 表面结构的3D计量图像.
主要成果:
- 在Si mesa结构上成功测量了SiO2薄膜厚度从20nm到150nm.
- 实现了对基板的测量,测量了几纳米级的深度.
- 从传输电子显微镜 (TEM) 和原子力显微镜 (AFM) 的光学3D图像和测量结果之间证明了一致性.
结论:
- 拟议的色度WLI方法可以同时测量20nm薄膜的地形和厚度.
- 该技术为微电子结构和薄膜表征提供了高分辨率计量技术.
- 结果验证了色度计方法在先进光学计量学中的有效性.
相关概念视频
01:05Total Internal Reflection Fluorescence Microscopy
Total internal reflection fluorescence microscopy or TIRF is an advanced microscopic technique used to visualize fluorophores in samples close to a solid surface with a higher refractive index, such as a glass coverslip. TIRF only allows fluorophores in proximity to the solid surface to be excited. When light from a medium with a lower refractive index (such as air) hits the glass coverslip at a critical angle, the light undergoes total internal reflection stead of passing through the glass.
01:28Three-Dimensional Microscopy in Microbiology
Three-dimensional imaging techniques are essential in cell biology, allowing researchers to visualize intricate cellular structures with high resolution. Two prominent methods, Differential Interference Contrast Microscopy (DIC) and Confocal Scanning Laser Microscopy (CSLM), provide distinct advantages for imaging live and thick specimens, respectively.Differential Interference Contrast MicroscopyDIC microscopy enhances contrast in transparent, unstained samples by converting phase...