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相关概念视频

IR Frequency Region: Fingerprint Region01:03

IR Frequency Region: Fingerprint Region

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IR spectra are divided into two main regions: the diagnostic region and the fingerprint region. The diagnostic region of the spectrum lies above 1500 cm−1. The absorptions resulting from single-bond vibrations of the N–H, C–H, and O–H stretch at higher wavenumbers and appear on the left side of the spectrum. The stretching absorptions of the C≡C and C≡N occur between 2100–2300 cm−1. In contrast, those arising from stretching absorptions of the...
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IR Frequency Region: X–H Stretching01:24

IR Frequency Region: X–H Stretching

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In IR spectroscopy, signals produced by the X−H bonds (such as C−H, O−H, or N−H) can be observed in the frequency range of  2700–4000 cm–1. The C−H stretching vibration forms sharp bands in the region 2850–3000 cm–1. The presence of the O−H stretching vibration leads to the forming of an absorption band in the frequency range 3650–3200 cm−1. At the same time, N−H stretching can be confirmed by absorption bands in...
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Lumber Defects01:23

Lumber Defects

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Lumber defects, which can affect both the appearance and structural integrity of wood, include a variety of growth and manufacturing flaws. Growth defects such as knots and knotholes occur where branches were once attached to the tree trunk, with knotholes forming when these knots fall out. Other natural defects include decay and insect damage, which compromise the wood's strength and durability.
Shakes are minor fractures that run along or across the wood's annual rings, while wane is...
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Computed Tomography01:10

Computed Tomography

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Tomography refers to imaging by sections. Computed tomography (CT) is a non-invasive imaging technique that uses computers to analyze several cross-sectional X-rays to reveal minute details about structures in the body.
The technique was invented in the 1970s and is based on the principle that as X-rays pass through the body, they are absorbed or reflected at different levels. In the technique, a patient lies on a motorized platform while a computerized axial tomography (CAT) scanner rotates...
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相关实验视频

Updated: Jan 10, 2026

Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography
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Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

Published on: May 15, 2017

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基于CTM-IYOLOv10网络的晶圆缺陷检测技术

Pengcheng Ji1, Zhenzhi He1, Weiwei Yang2

  • 1School of Mechanical and Electrical Engineering, Jiangsu Normal University, Xuzhou 221116, China.

Journal of imaging
|November 26, 2025
PubMed
概括

这项研究引入了改进的YOLOv10网络 (CTM-IYOLOv10) 用于半导体晶圆缺陷检测. 新方法提高了准确性和效率,大大改善了智能制造工艺.

关键词:
这就是YOLOv10的意义.集群模板匹配模板匹配智能制造 智能制造是一种智能制造.实时工业检查实时工业检查小物体检测 小物体检测晶圆缺陷检测 晶圆缺陷检测 晶圆缺陷检测

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科学领域:

  • 半导体制造业 半导体制造业
  • 人工智能的人工智能
  • 计算机视觉 计算机视觉

背景情况:

  • 半导体设备的缩放增加了晶圆模具的复杂性,需要先进的缺陷检测.
  • 传统的检查方法效率低下,容易出现错误,特别是在小缺陷时.

研究的目的:

  • 开发一个高效和准确的晶圆缺陷检测框架,用于智能制造.
  • 改进现有的深度学习模型,用于检测半导体晶片上的小和不规则的缺陷.

主要方法:

  • 集群模板匹配 (CTM) 与改进的YOLOv10网络 (CTM-IYOLOv10) 的集成.
  • 实施了修改后的GhostConv模块和增强的BiFPN,以改善特征表示和小物体检测.
  • 应用数据增强策略来增强模型的稳定性和概括性.

主要成果:

  • CTM-IYOLOv10实现了98.1%的检测准确度,超过了YOLOv5和YOLOv8.
  • 与基线YOLOv10.10相比,推断时间减少了23.2%,模型大小减少了52.3%.
  • 证明增强了模板细分效率,并减轻了冗余匹配.

结论:

  • CTM-IYOLOv10框架在晶圆缺陷检查的准确性,速度和模型大小方面提供了显著的改进.
  • 拟议的架构为半导体制造业的实时缺陷检测提供了实用和有效的解决方案.