对高级制造应用的光学计量技术的审查
Fangyuan Zhao1, Hanyao Tang1, Xuerong Zou1
1Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Micromachines
|November 27, 2025
概括
光学计量技术为先进制造提供了超高精度. 这些无接触技术使得精确的定位和表面地形测量成为智能生产的关键.
科学领域:
- 计量学和测量科学 计量学和测量科学
- 制造业 工程 制造工程
- 光学物理学的光学物理学
背景情况:
- 先进的制造需要超高精度的测量技术,非接触式操作,高吞吐量和实时适应性.
- 基于接触的传统方法在满足这些严格要求方面存在局限性.
- 光学计量学作为精密制造的关键推动因素具有明显的优势.
研究的目的:
- 审查用于先进制造应用的光学计量技术.
- 为了强调精确的定位和表面地形测量.
- 突出光学计量学在弥合宏观和纳米尺度表征中的作用.
主要方法:
- 对干扰仪,光学编码器和飞行时间方法进行精确定位 (线性和角度测量) 的审查.
- 对干涉测量,结构化光谱测量和共聚焦显微镜的审查,用于在各种尺度上进行表面地形特征.
- 整合光学计量方法用于结构评估和流程优化.
主要成果:
- 光学计量技术使准确的线性和角度测量能够实现精确的定位.
- 各种光学方法提供可靠的表面特征,从大型结构到微型和纳米尺度特征.
- 光学计量学的整合桥梁宏观和纳米尺度的表征.
结论:
- 光学计量学对于先进制造至关重要,它支持高精度和智能生产.
- 这些技术对于结构评估和实时流程优化都至关重要.
- 这一综述是对未来高精度制造业进步的参考.
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