Calibration Curves: Linear Least Squares
Curvilinear Motion: Rectangular Components
Curvilinear Motion: Normal and Tangential Components
Residuals and Least-Squares Property
Reducing Line Loss
Elevation of Intermediate Points on Vertical Curves
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Jiale Liu1, Wenjing He1, Wenhao Ding1
1School of Automation, Guangdong University of Technology, Mega Education Center South, Guangzhou 510006, China.
本研究介绍了一种深度学习框架,用于优化半导体制造中的次分辨率辅助特性 (SRAF). 人工智能模型大大加速了SRAF的改进,提供了高模式保真性和降低计算成本.
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