2DOF

Panpan Chen1,2, Yangmin Li3

  • 1School of Engineering, Shandong Xiehe University, Jinan 250109, China.

Micromachines
|November 27, 2025
PubMed
概括

一个新的两度自由度 (2-DOF) 微定位阶段增强了振动辅助抛光. 它具有桥杆机制,可提供更大的冲动和更高的精度,克服了当前压电驱动器的局限性.

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