用于振动辅助抛光的2DOF微定位阶段的设计和建模
Panpan Chen1,2, Yangmin Li3
1School of Engineering, Shandong Xiehe University, Jinan 250109, China.
Micromachines
|November 27, 2025
概括
一个新的两度自由度 (2-DOF) 微定位阶段增强了振动辅助抛光. 它具有桥杆机制,可提供更大的冲动和更高的精度,克服了当前压电驱动器的局限性.
科学领域:
- 机械工程 机械工程
- 精密工程 精密工程是指精密的工程.
- 材料科学 材料科学 材料科学
背景情况:
- 振动辅助抛光需要精确的微定位阶段.
- 现有阶段面临的挑战是有限的工作时间,精度和响应时间.
- 压电驱动器提供高分辨率,但其位移受到限制.
研究的目的:
- 为振动辅助抛光提出一种新的两度自由度 (2-DOF) 微定位阶段.
- 为了应对工作次数不足,精度低以及响应时间的局限性.
- 为了提高精密制造中使用的阶段的性能.
主要方法:
- 桥杆放大机制的设计,以放大压电执行器位移.
- 使用卡斯蒂格利亚诺第二定理和弹性束理论进行静态建模.
- 分析模型的推导和通过有限元模拟进行验证.
主要成果:
- 拟议的阶段实现了动力学解和出色的动态性能.
- 与模拟相比,分析模型在4.6%的低误差下得到验证.
- 桥杆机制有效地弥补了有限的压电驱动器冲动.
结论:
- 开发的2DOF微定位阶段为振动辅助抛光提供了可行的解决方案.
- 该设计为创建具有卓越动态特性的大冲动,压力驱动阶段提供了洞察力.
- 这项研究有助于精密工程的进步,用于抛光应用.
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