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开发真空室型电容微压传感器

Lung-Jieh Yang¹, De-Yu Jiang¹, Wei-Chen Wang¹

¹Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251301, Taiwan.

|November 27, 2025

概括

这项研究开发了一种用于动态流场测量的新型电容压力传感器. 传感器达到1-2 Pa的分辨率,增强了流量监控能力.

科学领域:

传感器技术传感器技术
微电子机械系统 (MEMS) 是一种微电子机械系统.

背景情况:

精确的动力压力测量对于理解流体动力学至关重要.
现有的传感器可能缺乏对低压流场所需的灵敏度或线性.

研究的目的:

为动态流域应用开发和描述一个高分辨率电容式压力传感器.
为了利用CMOS-MEMS技术进行集成传感器制造.

主要方法:

使用UMC 0.18μm CMOS-MEMS工艺进行制造,并进行后处理 (金属蚀刻,超临界CO2干燥,烯封装).
使用AD7746电容电压转换器 (CVC) 进行信号处理.
设计了一种真空密封的隔膜囊,配有双可移动的圆形膜,以及用于接触模式电容传感的形/形真空室隔膜.

主要成果:

开发的电容式压力传感器证明了动态压力测量的可行性.
实现了适合低至1-2 Pa的分辨率的输出灵敏度.
该设计通过其特定的隔膜和腔室配置来增强线性和灵敏性.

结论:

CMOS-MEMS电容式压力传感器是一种可行的解决方案,用于在流场中精确的动态压力测量.
传感器设计为低压传感应用提供了改进的性能特性.
预计将在流体动力学研究中进一步整合和应用.

关键词:

电容式压力传感器补充性金属氧化物半导体 (CMOS)在真空室的真空室.

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