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Updated: Jan 10, 2026

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
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在InOx/AlOx异构结构中热温度组合的影响,用于高性能和稳定的解决方案处理的无连接晶体管

Jinhong Park1, Dohyeon Gil1, Se Jin Park1

  • 1School of Electronic and Electrical Engineering, Kyungpook National University, 80 Daehakro, Bukgu, Daegu 41566, Republic of Korea.

Materials (Basel, Switzerland)
|November 27, 2025
PubMed
概括

在无连接晶体管中的氧化和氧化层的高温回火显著提高了设备性能和偏差稳定性. 这个过程是可靠,高性能氧化物电子的关键.

关键词:
没有连接的薄膜晶体管.金属氧化物 - 金属氧化物积极偏见的不稳定性是不稳定的.热化热化 热化

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