直接制造倾斜侧墙微槽,具有形状平顶梁的直接制造
Jianyong Mao1, Wenqiang Chen1, Kai Chen2
1Key Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Laboratory of Information Photonic Technique, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
五秒激光处理使得在晶片上制造具有倾斜侧壁的微槽成为可能. 这种方法提供了一种高质量的途径,可以有效地创建功能微结构.
科学领域:
- 材料科学 材料科学 材料科学
- 光学工程是指光学工程.
- 纳米技术纳米技术
背景情况:
- 微槽对于各种应用至关重要.
- 五秒激光处理提供了高精度和最小的热损伤.
研究的目的:
- 开发一种制造具有倾斜侧墙的微槽的方法.
- 使用形状平顶激光束用于精确的微观结构制造.
主要方法:
- 使用有形平顶激光束制造微槽.
- 控制梁形状和扫描参数,以定制侧墙形态.
- 在晶片上进行单扫描处理.
主要成果:
- 成功制造了带有倾斜侧墙的微槽.
- 通过可控激光处理实现了量身定制的侧墙形态.
- 使用燃烧格子原型验证了光学性能.
结论:
- 拟议的方法提供了一种高效和高质量的制造技术.
- 这种方法适用于和类似材料上的功能微结构.
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