在TC-SAW共振器中通过应用曲的金属条纹来抑制虚假模式
Menghui Li1, Mengke Qi1, Yuanhang Chen1
1Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
Sensors (Basel, Switzerland)
|November 27, 2025
概括
曲的金属条有效地抑制了温度补偿表面声波 (TC-SAW) 共振器中的虚假模式. 这种新的方法通过减轻不必要的横向和间隙模式而提高了共振器的性能,而不会影响质量因素.
科学领域:
- 声学 声学 在声学方面
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
背景情况:
- 表面声波 (SAW) 共振器对于信号处理至关重要.
- 温度补偿SAW (TC-SAW) 共振器提供了增强的稳定性.
- 在TC-SAW共振器中的虚假模式降低了性能.
研究的目的:
- 为了研究曲金属条纹在TC-SAW共振器中对虚假模式抑制的有效性.
- 分析曲金属条形几何对模式抑制的影响.
- 通过实验验证拟议的方法.
主要方法:
- 在TC-SAW共振器中使用SiO2/Cu/128°YX-LiNbO3结构.
- 在数字间传感器 (IDT) 的光圈和间隙区域实施曲的金属带.
- 采用3D有限元素方法 (FEM) 进行理论计算.
- 进行了实验验证.
主要成果:
- 曲的金属条纹有效地抑制横向模式.
- 拟议的方法减轻了源自共振器间隙的间隙模式.
- 模拟和实验证实了显著的虚假模式抑制.
- 响应器的质量因子没有受到影响.
结论:
- 曲的金属条是TC-SAW共振器中虚假模式抑制的可行解决方案.
- 这种技术提高了SAW设备的可靠性和性能.
- 该方法提供了一种改善TC-SAW共振器特性的实用方法.
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