垂直钻石肖特基屏障二极管边缘终结技术的最新发展和挑战
Genzhuang Li1,2, Wang Lin3,4, Shishuai Liu1,2
1Xinjiang Laboratory of Phase Transitions and Microstructures in Condensed Matter Physics, College of Physical Science and Technology, Yili Normal University, Yining 835000, China.
钻石动力电子设备显示出希望,但性能受到Schottky屏障二极管 (SBD) 中边缘终端结构的限制. 本综述考察了改进的钻石半导体设备的当前结构和制造挑战.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 钻石的特殊材料特性引发了对电力电子设备的兴趣.
- 大型,高质量的单晶钻石晶片的进步加速了工业化.
- 钻石Schottky屏障二极管 (SBD) 已经发展成为横向,准垂直和垂直导电类型.
研究的目的:
- 审查钻石Schottky屏障二极管 (SBD) 的边缘终端结构.
- 分析不同SBD边缘终结设计的优点.
- 讨论优化钻石SBD性能的制造挑战.
主要方法:
- 对钻石SBDs现有的边缘终结结构的文献综述.
- 对设备性能指标的分析,包括前置开启电压,启动电阻和故障电压.
- 讨论制造过程中的挑战.
主要成果:
- 钻石SBD的性能目前有限,需要优化边缘终结.
- 存在各种边缘终端结构,每个都有特定的优势.
- 制造过程对设备优化提出了关键挑战.
结论:
- 有效的边缘终结对于释放钻石在动力电子中的全部潜力至关重要.
- 需要对新的边缘终端设计和制造技术进行进一步的研究.
- 优化SBD将增强前置和外置电气特性.
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