一个层次的子建模方法用于TFT-FOPLP的热力学分析
Hsien-Chie Cheng1, Ching-Feng Yu2
1Department of Aerospace and Systems Engineering, Feng Chia University, Taichung.
Science progress
|December 1, 2025
概括
分析了薄膜晶体管风扇外面面板级包装 (TFT-FOPLP) 中的热力学应力. 在关键层 (如门绝缘体和被动化层) 中确定了高应力,这对设备性能和可靠性构成风险.
科学领域:
- 材料科学与工程 材料科学与工程
- 半导体设备物理 半导体设备物理
- 机械工程 机械工程
背景情况:
- 大面积薄膜晶体管风扇外面面板级包装 (TFT-FOPLP) 在制造过程中面临着重大的热力学应力挑战.
- 了解应力分布对于确保先进包装技术的可靠性和性能至关重要.
研究的目的:
- 调查和量化TFT-FOPLP中的热力学应力分布,从面板到单个设备尺度.
- 识别易受机械故障或性能恶化的关键区域和组件.
主要方法:
- 利用基于有限元素建模的层次次子建模方法.
- 采用了同质化的全球模型来确定高压力区域,随后采用了两级子模型来对单个TFT细胞进行详细分析.
- 从制造温度模拟的热冷却条件.
主要成果:
- 在位于面板边缘附近的模具角处确定最大应力度.
- 门绝缘体验拉力应力 (~44.5 MPa) 和应变 (~0.1%),可能会影响电性能.
- 脆弱的介电层,如被动化层,预计会承受高应力 (~407 MPa),这表明机械断裂的风险.
结论:
- TFT-FOPLP概念在机械上是可行的,但应激减轻策略对于脆弱地区至关重要.
- 有限元素建模框架能够早期预测高压力区域,支持可靠性设计并减少物理原型设计.
- 进一步的研究应该将模拟结果与实验数据相关联,以建立TFT-FOPLP的定量设计规则.
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