时间隔离的拉曼光谱使用3D堆叠的背面照亮的CMOS SPAD阵列.
Optics letters
|December 1, 2025
概括
这项研究展示了一种新的背面照明 (BSI) 单光子雪崩二极管 (SPAD) 阵列,用于时间分辨率拉曼光谱. 阿特拉斯传感器实现了高计数率和精确的定时,使微秒光谱峰值观测成为可能.
科学领域:
- 光子学和光谱成像技术
- 先进的半导体设备 半导体设备
- 这是一种CMOS传感器技术.
背景情况:
- 单光子雪崩二极管 (SPAD) 对于低光成像至关重要.
- 背面照明 (BSI) 技术提高了光检测效率.
- 时间分辨率传感对于光谱应用至关重要.
研究的目的:
- 为了描述Atlas BSI SPAD阵列的时间响应.
- 展示BSI SPAD数组首次用于时间解析拉曼光谱的使用.
- 评估用于光谱应用的Atlas传感器的性能.
主要方法:
- 描述128x128 BSI SPAD阵列的时间响应.
- 使用阿特拉斯传感器实现时间分辨率拉曼光谱.
- 与前侧照明的SPAD阵列 (RaII) 的性能比较.
主要成果:
- 实现了1.44 ns (FWHM) 的平均时间分辨率和~153 ps的时间偏移.
- 与RaII传感器相比,计数速度得到了10.7倍的改善.
- 成功检测了微秒曝光的拉曼光谱峰值.
结论:
- 阿特拉斯BSI SPAD阵列在光谱学方面具有显著的优势.
- 3D堆叠的BSI CMOS技术可以实现高性能时间分辨率传感.
- 这项工作为先进的光谱成像应用铺平了道路.
相关概念视频
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