在标准传输电子显微镜样本上直接原子力显微镜的可行性和策略
Michéle Brugger-Hatzl1, Verena Reisecker2, Anas Alatrash3
1Institute of Electron Microscopy and Nanoanalysis, NAWI Graz, Graz University of Technology, Steyrergasse 17, Graz 8010, Austria; Graz Centre for Electron Microscopy, Steyrergasse 17, Graz 8010, Austria.
概括
相对显微镜结合了原子力显微镜 (AFM) 和传输电子显微镜 (TEM) 允许进行详细的材料分析. 本研究提出了在TEM样本上直接AFM测量的策略,克服了加强表征的准备挑战.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 显微镜的使用方法
背景情况:
- 相对显微镜集成了多种技术,用于全面的样本分析.
- 原子力显微镜 (AFM) 和传输电子显微镜 (TEM) 提供互补的表面和地下数据.
- 由于样本准备要求不同,AFM和TEM测量的直接相关性具有挑战性.
研究的目的:
- 在相同的样本区域上建立AFM和TEM测量之间的直接相关性.
- 为标准的TEM样本类型开发和验证AFM测量策略.
- 为了克服表面扭曲和相关AFM-TEM研究中的有限可访问性等挑战.
主要方法:
- 针对薄膜和TEM叶片的定制AFM测量策略.
- 为了获得最佳的图像质量,比较各种悬臂尺寸和AFM模式.
- 利用聚焦电子束诱导沉积 (FEBID) 来制造先进的AFM尖端,以提高可访问性.
主要成果:
- 在没有额外准备的情况下,在TEM样本上证明了成功的AFM测量.
- 从同一样本区域获得的AFM和TEM数据之间实现了直接相关性.
- 战略有效地解决了表面扭曲和可访问性问题.
结论:
- 开发的AFM策略能够与TEM直接相关,从而增强材料的特性.
- 这种方法扩大了相关显微镜对先进材料分析的实用性.
- 这些发现强调了综合AFM-TEM调查的实际可行性.
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