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Updated: Jan 9, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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基于光的电子偏差校正器

Marius Constantin Chirita Mihaila1, Petr Koutenský1, Kamila Moriová1

  • 1Department of Chemical Physics and Optics, Faculty of Mathematics and Physics, Charles University, Prague, Czech Republic.

Nature photonics
|December 5, 2025
PubMed
概括

科学家在电子显微镜中使用形状光场纠正了球形偏差. 这一突破使原子分辨率成像能够通过克服电子透镜的关键限制来实现.

关键词:
适应光学适应光学量子光学就是一个量子光学.

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