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基于PMUT阵列的高率超声波流量计,具有双向声波束.

Yufeng Gao1, Xili Wang1,2, Lei Zhao3

  • 1School of Integrated Circuits, Peking University, Beijing, China.

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概括

这项研究引入了一种新的压电微机超声波传感器 (PMUT) 阵列,用于增强的超声波流量计. 这种V形的声波束模式使得更快,单步双向流量测量速度更快.

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科学领域:

  • 超声波技术的超声波技术
  • 声学工程 声学工程
  • 流体动力学 流体动力学

背景情况:

  • 传统的超声波流量计面临着率限制,原因是连续的上游/下游飞行时间 (ToF) 测量.
  • 现有的方法通常需要交替运行的配对传感器,增加复杂性并降低效率.

研究的目的:

  • 为了展示一个小型化的压电微机超声波传感器 (PMUT) 阵列,能够产生对称的V形声波束图案.
  • 为了实现同步的,双向的超声波信号传输,以改善流量监控.
  • 为了克服传统的飞行时间 (ToF) 超声波流量计的率限制.

主要方法:

  • 一个5通道,~250 kHz的PZT PMUT相位阵列 (3.6 mm × 3.6 mm) 设计用于生成一个V形双向光束.
  • 优化了阵列间距和顺序控制,用于利用格叶,在27°和153°创建双主叶.
  • 安装几何学被优化,以提高ToF分辨率和适应各种管道配置的适应性,包括直线和齐克扎克的设计.

主要成果:

  • 该PMUT阵列实现了非凡的率,每秒可进行1000次上游和下游ToF测量.
  • 高性能流量监测被证明具有很大的范围 (0.5-35 L·min-1),高分辨率 (185 ns/(L·min-1),和优秀的线性 (0.997).
  • 该系统成功地测量了传统的直管和优化的齐格扎格管道中的空气流量.

结论:

  • 开发的PMUT阵列提供了一个有前途的单步,中空流速测量解决方案.
  • 与传统的超声波流量计相比,这种技术显著提高了率和性能.
  • V 形光束图案和优化的阵列设计为未来的流量监控应用提供了潜在的进步.