由带线储存驱动的真空排放作为极端紫外线辐射的来源
P S Antsiferov1,2, L V Stepanov1,2, N D Matiukhin1,3
1Department of Atomic Spectroscopy, Institute for Spectroscopy, Russian Academy of Sciences, Troitsk, Moscow 108840, Russia.
The Review of scientific instruments
|December 10, 2025
概括
这项研究引入了一种使用放电等离子体的新型极紫外 (EUV) 辐射源. 创新的设计能够有效地产生多重电荷离子,为先进的应用提供了低碎片的前景.
科学领域:
- 等离子体物理学的物理学
- 原子和分子物理 原子和分子物理
- 光学和光子学 在光学和光子学.
背景情况:
- 极端紫外线 (EUV) 辐射源对于半导体光刻等应用至关重要.
- 现有的EUV源经常面临效率,碎片生成和操作复杂性的挑战.
- 开发紧,高效和低碎片的EUV源仍然是一个活跃的研究领域.
研究的目的:
- 介绍一种基于放电等离子体的新型源,用于产生极紫外线 (EUV) 辐射.
- 研究等离子电子的能量获取机制,以产生多电荷离子.
- 描述开发的源的等离子动态和EUV发射特性.
主要方法:
- 使用带线存储驱动的放电电路,电压为10.5kV.
- 使用等离子电子的直接电场加速进行离子电离.
- 通过同时使用EUV光谱和封闭微通道板 (MCP) 针孔成像 (20 ns封闭) 进行等离子动态研究.
主要成果:
- 证明了一种能够产生EUV辐射的放电等离子源.
- 展示了等离子电子直接从应用的电场中获得能量,从而产生多次充电的离子 (100-200 eV的电离潜力).
- 估计的轴性等离子体膨胀速度在 (2-4) × 10^6 cm/s使用四MCP针孔摄像头,低电极侵蚀和短放电时间 (300-400 ns) 建议最小的碎片.
结论:
- 展示的放电等离子源是EUV辐射生成的有希望的候选者.
- 直接电场加速机制为产生多重电荷离子提供了有效的途径.
- 具有特点的低碎片和可控制的等离子体动力学表明它适合于各种EUV应用.
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