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验证电子对分布函数分析:多重散射,光束,测量和处理参数的作用

Sangjun Kang¹, Hyeyoung Cho², Maximilian Töllner²

¹In situ Electron Microscopy, Department of Materials Science, Technical University of Darmstadt (TUDa), 64287 Darmstadt, Germany; Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), 76344 Eggenstein-Leopoldshafen, Germany; Karlsruhe Nano Micro Facility (KNMFi), Karlsruhe Institute of Technology (KIT), 76344 Eggenstein-Leopoldshafen, Germany.

Ultramicroscopy

|December 13, 2025

概括

这项研究通过使用模拟和实验调查关键参数,优化了对无序材料的电子对分布函数 (ePDF) 分析. 它为无形和纳米结构材料的精确结构分析提供了指导方针.

科学领域:

材料科学材料科学材料科学
凝聚物质物理学凝聚物质物理学
电子显微镜电子显微镜

背景情况:

电子对分布函数 (ePDF) 分析与4D-STEM相结合,提供了对无序材料中局部原子结构的详细见解.
准确的ePDF分析对实验和仪器参数都很敏感,因此需要进行系统的调查以获得可靠的结果.

研究的目的:

系统地调查各种电子光学,测量和处理参数对ePDF分析准确性的影响.
确定从无序的材料中提取精确的ePDF数据的最佳条件.
为提高ePDF分析的精度和可靠性提供实际指导方针.

主要方法:

使用多切片电子衍射模拟作为参数调查的主要工具.
通过使用4D-STEM数据进行实验验证的模拟.
检查了衍射角度范围,光束收,探测器分辨率,样品厚度,噪声和光束前行的影响.

主要成果:

确定了影响ePDF准确性的关键参数,包括衍射角度范围,光束收度和样品厚度.
量化了噪音和探测器分辨率对ePDF提取的影响.
证明了电子束偏移对减少文物和提高数据质量的影响.

结论:

在无序的材料中建立了准确 ePDF 分析的最佳条件.
为研究人员提供实用指南,以提高ePDF研究的精度和可靠性.
为 ePDF 分析无形和纳米结构材料技术的进步做出了贡献.

关键词:

电子对的分布函数是电子对的分布函数.四维扫描传输电子显微镜四维扫描传输电子显微镜辐射分布函数的辐射分布函数这是一个STEM-PDF.

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