概括
这项研究引入了一种新的横扫透焦显微镜,用于在透明材料中精确的3D缺陷定位. 这种创新技术实现了分像素精度,提高了制造和检查中的质量控制.
科学领域:
- 光学计量学 在光学计量学
- 材料科学 材料科学 材料科学
- 质量控制 质量控制 质量控制
背景情况:
- 精确的3D定位地下缺陷对于制造和检查至关重要.
- 传统的光学方法在实现大视野和高定位精度方面存在局限性.
研究的目的:
- 开发一种先进的显微镜技术,用于精确的3D定位和检测地下缺陷.
- 在透明样本中克服传统光学测量技术的局限性.
主要方法:
- 提出了一种横扫透焦显微镜系统.
- 利用光学轴倾斜来捕捉在单个图像中不同深度的缺陷.
- 集成的水平扫描用于扩展视野3D定位.
主要成果:
- 在3D缺陷定位中,通过对SiO2样本的环光照明,实现了亚像素精度.
- 在深度测量中显示了0.77%的相对标准偏差.
- 通过微球样本验证了广场3D定位能力.
结论:
- 拟议的横扫透焦显微镜能够准确地对地下缺陷进行广场3D定位.
- 环灯照明显著提高了定位的准确性和精度.
- 该系统为透明材料的非破坏性测试提供了一个有希望的解决方案.
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