(CaF2) 使DUV

Optics letters
|December 15, 2025
PubMed
概括

使用深紫外线 (DUV) 干扰测量对化 (CaF2) 窗户的光学测试显示了显著的指数均性改进. 这种先进的方法对于高分辨率光刻光学至关重要.

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