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Updated: Jan 8, 2026

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高性能极端紫外线光刻的途径 抵抗: 分离式电子附着在五二三酸盐上

Mónica Mendes1, Reza Tafrishi2, Pedro Guerra1

  • 1CEFITEC, Department of Physics, NOVA University Lisbon, School of Science and Technology, 2829-516 Caparica, Portugal.

iScience
|December 16, 2025
PubMed
概括

高灵敏度电阻对于极端紫外线光刻 (EUVL) 非常重要. 这项研究揭示了光酸发生器 (PAG) 中的电子驱动化学可以意外地阻碍,而不是帮助酸生成,影响EUVL抵抗灵敏度.

关键词:
分析化学是一种分析化学.分析化学分析分析分析化学分析化学化合物是一种化学化合物.理论有机化学 有机化学理论.

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Electrophilic Aromatic Substitution: Fluorination and Iodination of Benzene01:13

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Bromination and chlorination of aromatic rings by electrophilic aromatic substitution reactions are easily achieved, but fluorination and iodination are difficult to achieve. Fluorine is so reactive that its reaction with benzene is difficult to control, resulting in poor yields of monofluoroaromatic products. To address this, Selectfluor reagent is used as a fluorine source in which a fluorine atom is bonded to a positively charged nitrogen.
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