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M J Adriaans1, J P Hoogenboom1, A Mohammadi-Gheidari1

  • 1Department of Imaging Physics, Delft University of Technology, Delft, the Netherlands.

Ultramicroscopy
|December 17, 2025
PubMed
概括

研究人员开发了一种经济高效的单色仪,用于扫描电子显微镜 (SEM). 这种新设计使用边缘场,减少对缺陷的敏感性,降低高性能能量过的成本.

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