深度强化学习用于调度不同配置的半导体集群工具
Jongwon Choi1, Seoung Bum Kim2
1Department of Industrial and Management Engineering, Korea University, Seoul, Republic of Korea.
Scientific reports
|December 17, 2025
概括
深度增强学习 (DRL) 增强了半导体制造中的集群工具调度. 与传统方法相比,多代理DRL显著提高了生产力和适应能力.
科学领域:
- 半导体制造业 半导体制造业
- 人工智能的人工智能
- 运营研究 运营研究
背景情况:
- 传统的基于规则的集群工具调度是不灵活的,并在动态的半导体制造环境中扎.
- 现有的研究经常使用简化的模拟器,不反映现实世界设备的复杂性.
- 现代工厂需要适应性调度解决方案,以适应不同的工艺条件和设备.
研究的目的:
- 研究深度强化学习 (DRL) 的应用,以优化集群工具调度.
- 在真空 (VTM) 和大气 (ATM) 机器人集群工具系统的全面模拟中开发和评估DRL剂.
- 将DRL的性能与传统的基于规则的调度方法进行比较.
主要方法:
- 为VTM-ATM集群工具系统开发了一个详细的模拟环境.
- 逐步评估DRL剂,从单剂深度Q网络 (DQN) 开始.
- 已升级为多代理DQN (MADQN) 框架,用于编程集成的VTM-ATM系统.
主要成果:
- 在生产力和适应性方面,DRL代理商的表现始终优于传统基于规则的方法.
- 在复杂的多药剂场景中,MADQN药物表现强.
- 与标准基于规则的调度相比,实现了高达8.9%的生产率提高.
结论:
- DRL提供了一个强大的解决方案,可以克服传统集群工具调度的局限性.
- MADQN框架有效地优化了在动态半导体制造环境中的调度.
- DRL具有显著的潜力,可以提高半导体制造业的整体生产率.
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