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    科学领域:

    • 光学计量学 在光学计量学
    • 精密工程 精密工程是指精密的工程.

    背景情况:

    • 传统的菲泽奥干扰测法面临着表面平坦性假设和环境干扰的挑战.
    • 液体表面可能会受到诸如边缘透等因素的影响,随着时间的推移改变其形状.

    研究的目的:

    • 开发一套高精度的Fizeau干扰测量系统,利用液体参考来提高测量精度.
    • 研究抑制干扰度测量的倾斜误差的方法.

    主要方法:

    • 一种静止时间偏振相位移方法,配有液晶变量减速器,用于稳定的相位移.
    • 使用100cSt二甲基油作为干扰模块中的液体参考.
    • 采用结合差分法来对直角转换和获得参考液体的表面形状.

    主要成果:

    • 液体参考运动抑制了机动阶段引导的倾斜误差,利用液体特性和重力.
    • 环境振动,机械运动和漂移引起的倾斜误差通过平均和高精度测量约束来减轻.
    • 实验结果表明,在校准后,残余垂直直径线的标准偏差有1.07nm的改善.

    结论:

    • 开发的Fizeau液体参考干扰测量系统提供了卓越的精度和稳定性.
    • 结合差分法有效地解决了液体表面形状偏差,并抑制了倾斜误差.
    • 这种方法显著提高了光学表面计量学的准确性.